Characterizations of silicon nanowires (SiNWs) embedded NEMS sensors and for potential biomedical applications

Author

Songsong Zhang ; Liang Lou ; Tao Wang ; Wei Mong Tsang ; Dim-Lee Kwong ; Chengkuo Lee

Author_Institution

Dept. of Electr. & Comput. Eng., Nat. Univ. of Singapore, Singapore, Singapore

fYear

2013

fDate

9-11 Dec. 2013

Firstpage

1

Lastpage

3

Abstract

Various Nanoelectromechanical Systems (NEMS) sensors using piezoresistive silicon nanowires (SiNWs) as the sensing elements for pressure, strain and flow detection are reported. Measurement results reveal both excellent scalability and sensing stability for SiNWs based NEMS devices. Additionally, the new ultracompact pressure sensor with novel micro-grooved diaphragm structure is reported for low pressure range measurement, which leads to potential bio-medical applications.

Keywords

blood flow measurement; nanomedicine; nanosensors; nanowires; piezoresistive devices; pressure measurement; pressure sensors; silicon; strain sensors; NEMS sensors; Si; biomedical applications; blood flow measurement; microgrooved diaphragm structure; nanoelectromechanical system; piezoresistive silicon nanowire characterizations; pressure detection; sensing elements; strain detection; ultracompact pressure measurement; Fabrication; Nanoelectromechanical systems; Nanowires; Piezoresistance; Sensor phenomena and characterization; Silicon; Silicon nanowires (SiNWs); blood flow; flow sensor; intraocular pressure (IOP); pressure sensor;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Workshop Series on RF and Wireless Technologies for Biomedical and Healthcare Applications (IMWS-BIO), 2013 IEEE MTT-S International

Conference_Location

Singapore

Type

conf

DOI

10.1109/IMWS-BIO.2013.6756159

Filename

6756159