Title :
Implementation of TCAD-for-Manufacturing Methodology using Process Compact Models
Author :
Borges, Ric ; Ma, Terry ; Ng, Wei-Choon ; Krishnamurthy, Sathya ; Bomholt, Lars
Author_Institution :
Silicon Eng. Group, Synopsys, Inc., Mountain View, CA
Abstract :
We report a complete TCAD methodology that addresses the considerable manufacturing challenges posed by rising technological complexity, increasing process variability and shrinking time-to-market windows. Using TCAD simulations as input, process compact models are created to enable efficient analysis of complex and multivariate process-device relationships, with applications to enhancing process manufacturability and process control. The methodology is illustrated with two case studies for 90nm CMOS and edge emitting laser technologies
Keywords :
CMOS integrated circuits; process control; semiconductor process modelling; technology CAD (electronics); 90 nm; CMOS technologies; TCAD simulations; TCAD-for-manufacturing methodology; edge emitting laser technologies; process compact models; process control; process manufacturability; CMOS technology; Computer aided manufacturing; Costs; Manufacturing processes; Phase change materials; Predictive models; Semiconductor device manufacture; Semiconductor device modeling; Semiconductor process modeling; Virtual manufacturing;
Conference_Titel :
Solid-State and Integrated Circuit Technology, 2006. ICSICT '06. 8th International Conference on
Conference_Location :
Shanghai
Print_ISBN :
1-4244-0160-7
Electronic_ISBN :
1-4244-0161-5
DOI :
10.1109/ICSICT.2006.306487
