A smart pressure transducer with on-chip readout, calibration and nonlinear temperature compensation based on spline-functions

Author

Machul, O. ; Hammerschmidt, D. ; Brockherde, W. ; Hosticka, B.J. ; Obermeier, E. ; Krause, P.

Author_Institution

Fraunhofer-Inst. of Microelectron. Circuits & Syst., Duisburg, Germany

fYear

1997

fDate

8-8 Feb. 1997

Firstpage

198

Lastpage

199

Abstract

A smart pressure transducer with a piezo resistive pressure sensor microbridge, digitally controlled readout electronics, and a nonlinear temperature compensation based on spline functions, is integrated on a single CMOS chip. The chip also contains a temperature sensor and control hardware for test and calibration functions. The calibration process of the sensing and temperature compensation parameters has been optimized for high volume production. The smart pressure transducer is in standard 2 /spl mu/m n-well CMOS technology completed by anisotropic cavity etching.

Keywords

CMOS integrated circuits; bridge circuits; calibration; compensation; diaphragms; digital readout; electric sensing devices; intelligent sensors; microsensors; mixed analogue-digital integrated circuits; piezoelectric transducers; piezoresistive devices; pressure sensors; pressure transducers; splines (mathematics); 2 micron; anisotropic cavity etching; digitally controlled readout electronics; high volume production; n-well CMOS technology; nonlinear temperature compensation; onchip calibration; onchip readout; piezoresistive pressure sensor microbridge; smart pressure transducer; spline functions; temperature sensor; CMOS technology; Calibration; Digital control; Intelligent sensors; Pressure control; Readout electronics; Spline; Temperature control; Temperature sensors; Transducers;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Circuits Conference, 1997. Digest of Technical Papers. 43rd ISSCC., 1997 IEEE International

Conference_Location

San Francisco, CA, USA

ISSN

0193-6530

Print_ISBN

0-7803-3721-2

Type

conf

DOI

10.1109/ISSCC.1997.585565

Filename

585565