Title :
Integrated cryogenic current comparator based on superconductor LSI technology
Author :
Urano, C. ; Maruyama, M. ; Oe, T. ; Maezawa, M. ; Yamada, T. ; Hidaka, M. ; Satoh, T. ; Nagasawa, S. ; Hinode, K. ; Kiryu, S. ; Kaneko, N.
Author_Institution :
Nat. Metrol. Inst. of Japan (NMIJ), Nat. Inst. of Adv. Ind. Sci. & Technol. (AIST), Tsukuba, Japan
Abstract :
A new implementation of Sullivan-Dziuba type cryogenic current comparators (CCCs) is proposed. We designed an integrated CCC device consisting of a thin-film CCC, a pick-up coil and a SQUID sensor on a single chip. Prototype devices were fabricated by using a superconductor multilayer integrated circuit technology with chemical-mechanical polishing processes.
Keywords :
chemical mechanical polishing; cryogenic electronics; current comparators; integrated circuit design; large scale integration; superconducting integrated circuits; SQUID sensor; Sullivan-Dziuba type cryogenic current comparators; chemical-mechanical polishing process; integrated CCC device; integrated cryogenic current comparator; pick-up coil; superconductor LSI technology; superconductor multilayer integrated circuit technology; thin-film CCC; Chemical technology; Cryogenics; Integrated circuit technology; Large scale integration; Superconducting coils; Superconducting integrated circuits; Superconducting thin films; Thin film circuits; Thin film devices; Thin film sensors;
Conference_Titel :
Precision Electromagnetic Measurements (CPEM), 2010 Conference on
Conference_Location :
Daejeon
Print_ISBN :
978-1-4244-6795-2
DOI :
10.1109/CPEM.2010.5544185
