DocumentCode
3475263
Title
Resisitive switching variability study on 1T1R AlOx/WOx-based RRAM array
Author
Bin Jiao ; Ning Deng ; Jie Yu ; Yue Bai ; Minghao Wu ; Ye Zhang ; He Qian ; Huaqiang Wu
Author_Institution
Inst. of Microelectron., Tsinghua Univ., Beijing, China
fYear
2013
fDate
3-5 June 2013
Firstpage
1
Lastpage
2
Abstract
Resistive random access memories (RRAM) often show large variation due to the stochastic nature of the switching process. Bilayer AlOx/WOx based RRAM cells were investigated for key parameters variations. Those AlOx/WOx memory devices were fabricated in a commercial CMOS foundry. Yield of forming process is studied with different transistor size and forming voltage. The tradeoff between array size, speed and power consumption are discussed.
Keywords
CMOS memory circuits; MOSFET; aluminium compounds; power consumption; random-access storage; tungsten compounds; 1T1R-based RRAM array; AlOx-WOx; array size; bilayer-based RRAM cells; commercial CMOS foundry; forming voltage; memory devices; parameters variations; power consumption; resisitive switching variability; resistive random access memories; switching process; transistor size; Arrays; Switches; AlOx; RRAM; WOx; variation;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices and Solid-State Circuits (EDSSC), 2013 IEEE International Conference of
Conference_Location
Hong Kong
Type
conf
DOI
10.1109/EDSSC.2013.6628071
Filename
6628071
Link To Document