Title :
Proceedings of 11th International Conference on Ion Implantation Technology
Abstract :
The following topics were dealt with: device processing; process control; advanced implanter systems; manufacturing applications; ion-solid interactions; materials science; future trends and applications
Keywords :
ion implantation; device processing; ion implantation technology; ion-solid interaction; manufacturing; materials science; process control;
Conference_Titel :
Ion Implantation Technology. Proceedings of the 11th International Conference on
Conference_Location :
Austin, TX, USA
Print_ISBN :
0-7803-3289-X
DOI :
10.1109/IIT.1996.586095
