DocumentCode
3477589
Title
Proceedings of 11th International Conference on Ion Implantation Technology
fYear
1996
fDate
16-21 June 1996
Abstract
The following topics were dealt with: device processing; process control; advanced implanter systems; manufacturing applications; ion-solid interactions; materials science; future trends and applications
Keywords
ion implantation; device processing; ion implantation technology; ion-solid interaction; manufacturing; materials science; process control;
fLanguage
English
Publisher
ieee
Conference_Titel
Ion Implantation Technology. Proceedings of the 11th International Conference on
Conference_Location
Austin, TX, USA
Print_ISBN
0-7803-3289-X
Type
conf
DOI
10.1109/IIT.1996.586095
Filename
586095
Link To Document