• DocumentCode
    348188
  • Title

    The onset of the high level of injection in MOS structures

  • Author

    Rusu, A. ; Dobrescu, D. ; Anghel, C.

  • Author_Institution
    Fac. of Electron. & Telecommun., Politehnica Univ. of Bucharest, Romania
  • Volume
    1
  • fYear
    1999
  • fDate
    1999
  • Firstpage
    153
  • Abstract
    The dependence of the inversion charge on the gate voltage in MOS structures has the same behaviour like the diffusion current versus the applied voltage in a pn doped junction. As a similarity, the terms “low level” and “high-level” of injection are extended over the MOS operation. The paper determinates the surface potential, φC, that separates the two regimes and demonstrates that its values are greater than the surface potential 2φB with 111...132 m V, for the usual doping concentration of the substrate. These results permit to use the low-level of injection model in MOS structures even in strong inversion condition
  • Keywords
    MIS structures; charge injection; inversion layers; surface potential; MOS structure; charge injection; inversion layer; substrate doping concentration; surface potential; Dielectric constant; Doping; Electrons; Equations; Knee; MOS capacitors; MOSFETs; Semiconductor process modeling; Silicon; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Conference, 1999. CAS '99 Proceedings. 1999 International
  • Conference_Location
    Sinaia
  • Print_ISBN
    0-7803-5139-8
  • Type

    conf

  • DOI
    10.1109/SMICND.1999.810451
  • Filename
    810451