DocumentCode
348206
Title
Probe-anode as a characterization tool for field emission arrays
Author
Nicolaescu, D. ; Filip, V. ; Itoh, J. ; Kleps, I.
Author_Institution
Inst. of Microtechnol., Bucharest, Romania
Volume
1
fYear
1999
fDate
1999
Firstpage
253
Abstract
A method of characterization for arrays of vertical field emitters is presented, which makes use of an anode of micron-sized dimensions. Modeling results show that the probe-anode emission current varies in a similar way as for large dimension anodes. Practical rules are derived for correct interpretation of the experimental data
Keywords
anodes; electron field emission; probes; vacuum microelectronics; emission current; field emission array; probe anode; Anodes; Atomic force microscopy; Current density; Field emitter arrays; Flat panel displays; Manufacturing; Micromachining; Physics; Scanning electron microscopy; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Conference, 1999. CAS '99 Proceedings. 1999 International
Conference_Location
Sinaia
Print_ISBN
0-7803-5139-8
Type
conf
DOI
10.1109/SMICND.1999.810509
Filename
810509
Link To Document