Title :
ZnO thin film optical window as partner for photodetecting heterostructures on Si and InP
Author :
Budianu, Elena ; Purica, Munizer ; Gavrila, Raluca ; Nastase, Stelian ; Rusu, Emil ; Slobodchikov, S.V. ; Turcu, M.
Author_Institution :
Nat. Inst. for Res. & Dev. of Microtechnol., Bucharest, Romania
Abstract :
Thin films of ZnO were deposited by thermal decomposition of Zn(C 5H7O2)2 on semiconductor substrate, n-type silicon, p-type InP and also on transparent glass substrate. The heterostructures of ZnO/Si and ZnO/InP were prepared and investigated for optical properties by spectrophotometry and surface morphology by AFM. The lateral photovoltage characteristic and surface roughness demonstrate availability of heterostructures with ZnO thin film for optoelectronic devices
Keywords :
II-VI semiconductors; MOCVD; atomic force microscopy; optical films; optical windows; photodetectors; photodiodes; semiconductor growth; semiconductor thin films; spectrophotometry; surface photovoltage; surface topography; transparency; zinc compounds; AFM; InP; MOCVD; Si; ZnO; ZnO-InP; ZnO-Si; high transparency; lateral photovoltage characteristic; optical properties; optical transmission; optoelectronic devices; photodetecting heterostructures; semiconductor substrate; spectral response; spectrophotometry; surface morphology; surface roughness; thermal decomposition; thin film optical window; transparent glass substrate; Indium phosphide; Optical films; Rough surfaces; Semiconductor thin films; Sputtering; Substrates; Surface morphology; Surface roughness; Windows; Zinc oxide;
Conference_Titel :
Semiconductor Conference, 1999. CAS '99 Proceedings. 1999 International
Conference_Location :
Sinaia
Print_ISBN :
0-7803-5139-8
DOI :
10.1109/SMICND.1999.810544
