Title :
Modeling of the effect of silicon needles sharpening during their thermal oxidation
Author :
Kalinin, S.V. ; Egorkin, Andrey V.
Author_Institution :
Novosibirsk State Tech. Univ., Novosibirsk, Russia
Abstract :
The thermal oxidation model developed using SProcess TCAD SenTaurus is considered. The cone-shaped silicon needle is used as a test structure. Simulation results show that the proposed model describes the phenomenon of the needle sharpening during their thermal oxidation in accordance with the experimental data. It is shown that for adequate modeling the consideration of some nonlinear mechanical effects is required.
Keywords :
elemental semiconductors; heat treatment; needles; oxidation; silicon; technology CAD (electronics); SProcess TCAD SenTaurus; Si; cone-shaped silicon needle; nonlinear mechanical effect; silicon needles sharpening; thermal oxidation model; Data models; Educational institutions; Electron devices; Needles; Oxidation; Silicon; Simulation;
Conference_Titel :
Actual Problems of Electronics Instrument Engineering (APEIE), 2012 11th International Conference on
Conference_Location :
Novosibirsk
Print_ISBN :
978-1-4673-2842-5
DOI :
10.1109/APEIE.2012.6628920
