Title :
Photocurrent measurements of electron traps on ITOX processed SIMOX structures
Author :
Lawrence, R.K. ; Ioannou, D.E. ; Stahibush, R.E. ; Hughes, H.L.
Author_Institution :
ARACOR, Washington, DC, USA
Abstract :
Photocurrent measurements have been performed on internal thermal oxide (ITOX) buried oxide (BOX) SIMOX structures. After electron injection, from a 5eV mercury light source, the net electron trapping per area for the ITOX structure was found to be larger than that of a control SIMOX structure. This increase has been attributed to the ITOX´s process influence on the formation of the ITOX/BOX oxide
Keywords :
SIMOX; buried layers; electron traps; photoconductivity; BOX; ITOX; SIMOX structures; buried oxide; electron injection; electron traps; internal thermal oxide; photocurrent measurements; Aluminum; Capacitance-voltage characteristics; Electron traps; Laboratories; Light sources; Lighting control; Oxidation; Performance evaluation; Photoconductivity; Voltage;
Conference_Titel :
SOI Conference, 1995. Proceedings., 1995 IEEE International
Conference_Location :
Tucson, AZ
Print_ISBN :
0-7803-2547-8
DOI :
10.1109/SOI.1995.526503
