MEMS-based photonic bandgap (PBG) band-stop filter

Author

Zhang, X.J. ; Liu, A.Q. ; Karim, M.F. ; Yu, A.B. ; Shen, Z.X.

Author_Institution

Sch. of Electr. & Electron. Eng., Nanyang Technol. Univ., Singapore, Singapore

Volume

3

fYear

2004

fDate

6-11 June 2004

Firstpage

1463

Abstract

A photonic bandgap (PBG) band-stop filter with flat response in a selected frequency band is designed in this paper. Two kinds of equivalent circuits for the proposed structure are derived and its parameters are extracted by using electromagnetic field software ADS. High resistivity silicon substrate and microelectromechanical systems (MEMS) surface micromachining process are employed. The measurement results revealed a 20 dB stop-band that has a width of 13.2 GHz, without ripples in the full band. The lower pass-band insertion loss is less than 2 dB and the higher pass-band insertion loss is less than 4.5 dB, without traces of ripples.

Keywords

band-stop filters; elemental semiconductors; equivalent circuits; micromachining; micromechanical devices; photonic band gap; 13.2 GHz; ADS; band-stop filter; electromagnetic field software; equivalent circuit; filter designing; microelectromechanical systems; parameter extraction; pass-band insertion loss; photonic bandgap; resistivity; ripples; silicon substrate; stop-band; surface micromachining process; Conductivity; Electromagnetic fields; Equivalent circuits; Filters; Frequency; Insertion loss; Microelectromechanical systems; Micromechanical devices; Photonic band gap; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Symposium Digest, 2004 IEEE MTT-S International

ISSN

0149-645X

Print_ISBN

0-7803-8331-1

Type

conf

DOI

10.1109/MWSYM.2004.1338849

Filename

1338849