Title :
Microjet fabrication of micro-optical components
Author :
Cox, W.R. ; Chen, T. ; Hayes, D.J. ; MacFarlane, D.L. ; Narayan, V. ; Tatum, J.A.
Author_Institution :
MicroFab Technol. Inc., Plano, TX, USA
fDate :
31 Oct-3 Nov 1994
Abstract :
We describe a data-driven, inkjet-based method for fabricating micro-optical components, such as microlenses and waveguides, by microjet dispensing and placing of microdroplets of optical materials onto optical substrates and optoelectronic components. We also show performance data for microjetted elements, such as arrays of plano-convex lenslets with diameters ranging between 40 and 150μm
Keywords :
jets; 40 to 150 micron; arrays; inkjet; micro-optical components; microjet fabrication; microlenses; optical materials; optical substrates; optoelectronic components; plano-convex lenslets; waveguides; Fabrication; Lenses; Microoptics; Optical arrays; Optical microscopy; Optical mixing; Optical polymers; Optical refraction; Printing; Scanning electron microscopy;
Conference_Titel :
Lasers and Electro-Optics Society Annual Meeting, 1994. LEOS '94 Conference Proceedings. IEEE
Conference_Location :
Boston, MA
Print_ISBN :
0-7803-1470-0
DOI :
10.1109/LEOS.1994.586886
