Title :
A DC to 100 GHz high performance ohmic shunt switch
Author :
Mercier, Denis ; Charvet, Pierre Louis ; Berruyer, Pascale ; Zanchi, Christine ; Lapierre, Luc ; Vendier, Olivier ; Cazaux, Jean Louis ; Blondy, Pierre
Author_Institution :
IRCOM, Limoges, France
Abstract :
This paper presents a wideband ohmic shunt switch implemented on a coplanar waveguide (CPW). The switch is fabricated using a dielectric membrane with patterned metallic contacts that short the CPW line when it is electrostatically actuated. The switch has been extrapolated from measurements. It exhibits low insertion loss, good matching, high isolation from DC to W band (>20 dB up to 100 GHz) and very good mechanical properties with switching time <1μs.
Keywords :
coplanar waveguide components; electrostatic actuators; microswitches; microwave switches; 0 to 100 GHz; RF MEMS; coplanar waveguide; dielectric membrane; electrostatic actuation; insertion loss; mechanical properties; metallic contacts; millimeter-wave switches; ohmic shunt switch; switching time; Biomembranes; Communication switching; Contacts; Coplanar waveguides; Electrodes; Equivalent circuits; Frequency; Insertion loss; Radiofrequency microelectromechanical systems; Switches;
Conference_Titel :
Microwave Symposium Digest, 2004 IEEE MTT-S International
Print_ISBN :
0-7803-8331-1
DOI :
10.1109/MWSYM.2004.1338987
