DocumentCode :
3493362
Title :
Precise and Flexible Modeling for Semiconductor Wafer Fabrication
Author :
Nakamura, Shinji ; Hashimoto, Chisato ; Mori, Osamu
Author_Institution :
NTT LSI Laboratories, Japan
fYear :
1993
fDate :
12-15 Dec 1993
Firstpage :
804
Lastpage :
813
Keywords :
Fabrication; Job shop scheduling; Laboratories; Performance analysis; Performance evaluation; Phase change materials; Semiconductor device manufacture; Semiconductor device modeling; Substrates; Virtual manufacturing;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Simulation Conference Proceedings, 1993. Winter
Print_ISBN :
0-7803-1381-X
Type :
conf
DOI :
10.1109/WSC.1993.718323
Filename :
718323
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3493362
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