One and Two Port Piezoelectric Contour-Mode MEMS Resonators for Frequency Synthesis

This paper reports on the design, fabrication and testing of novel one and two port piezoelectric contour-mode MEMS resonators that can be employed in RF wireless communications as frequency reference elements or arranged in arrays to form filterbanks. The paper offers a comparison of one and two port resonant devices exhibiting frequencies ranging from 80 to 800 MHz, quality factors from 1,000 to 4,000 in air and motional resistances ranging from 25 to 200 Omega. Fundamental advantages and limitations of each solution are discussed. Experimental results regarding a novel implementation of an 800 MHz one port resonators and a new class of two-port stacked contour resonators are presented