Title :
Fabrication of PDMS microfluidic chip used in Ultraviolet integrated biological chip
Author :
Yu, Shuai ; Qu, Yi ; Li, Te ; Zhao, Zhibin ; Yang, Hao ; Liu, Lei ; Tian, Chaoqun ; Wei, Donghan
Author_Institution :
Nat. Key Lab. on High-Power Semicond. Lasers, Changchun Univ. of Sci. & Technol., Changchun, China
Abstract :
Use polydimethylsiloxane(PDMS) fabricate a microfluidic chip as the sample channel in Ultraviolet integrated biological chip, By re-molding method using the PDMS of the ratio of matrix and curing agent is 10:1 fabricate the substrate of microfluidic chip, using the PDMS of the ratio of matrix and curing agent is 5:1 fabricate the cover sheet and complete the seal of the microfluidic chip. Fabricate the microfluidic chip with the channel width is 100μm, 50μm, 1mm and 2mm.
Keywords :
curing; microchannel flow; microfabrication; microsensors; moulding; polymers; ultraviolet detectors; PDMS microfluidic chip; channel sampling; curing agent; microfabrication; polydimethylsiloxane; remolding method; size 1 mm; size 100 mum; size 2 mm; size 50 mum; ultraviolet integrated biological chip; Biology; Curing; Fabrication; Films; Microfluidics; Seals; Silicon; polydimethylsiloxane(PDMS)mic; rofluidic chip; seal;
Conference_Titel :
Optoelectronics and Microelectronics (ICOM), 2012 International Conference on
Conference_Location :
Changchun, Jilin
Print_ISBN :
978-1-4673-2638-4
DOI :
10.1109/ICoOM.2012.6316336
