DocumentCode :
349444
Title :
Computer studies on projected range due to few eV to keV cluster impacts
Author :
Yorizane, K. ; Muramoto, T. ; Yamamura, Y.
Author_Institution :
Okayama Univ., Japan
Volume :
2
fYear :
1999
fDate :
36495
Firstpage :
803
Abstract :
The time-evolutionary Monte Carlo simulation code DYACAT and the molecular dynamics simulation code have been applied to investigate the cluster effects on the projected range of (Au)55 cluster impacts on Cu targets, changing the cluster energy from 10 eV/atom to 50 keV/atom. For high-energy incidence (>10 keV/atom), the projected range of cluster atoms is nearly equal to that of monatomic ions. For low-energy incidence (<10 keV/atom), the projected range of cluster atoms is much larger than that of monatomic ions due to the clear-the-way effect. For very-low-energy incidence (<30 eV/atom), the many-body effect plays an important role in the projected range. For the monatomic ion bombardment, it prevents monatomic ions from penetrating into the solid, where it restrains one of the clear-the-way effects for the cluster impact
Keywords :
Monte Carlo methods; copper; energy loss of particles; gold; impurity distribution; ion implantation; ion-surface impact; metal clusters; molecular dynamics method; physics computing; 10 eV to 50 keV; Au55 cluster; Cu; Cu:Au55; DYACAT code; clear-the-way effect; cluster impacts; computer studies; high-energy incidence; low-energy incidence; many-body effect; molecular dynamics simulation code; projected range; time-evolutionary Monte Carlo simulation code; Acceleration; Amorphous materials; Argon; Atomic measurements; Computational modeling; Computer simulation; Digital audio players; Gold; Solids; Sputtering;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Ion Implantation Technology Proceedings, 1998 International Conference on
Conference_Location :
Kyoto
Print_ISBN :
0-7803-4538-X
Type :
conf
DOI :
10.1109/IIT.1998.813789
Filename :
813789
Link To Document :
بازگشت