Comparison of termination structure design by device simulator

Termination region plays an important role in high voltage power VDMOSFETs. Termination structure such as floating-field-limiting-rings and field plates are the common structures used in a termination region because they can be fabricated without additional masks. However, sometimes we use both of them, sometimes only the floating-field-limiting-ring. The difference between these structures must be known while designing. In this paper, we compare and discuss the difference of the floating-field-limiting-rings with and without field plates. Understanding the difference is helpful for designing and saving time.