Title :
A 4-terminal compact model for high voltage diffused resistors with field plates
Author :
Victory, Jaimes ; McAndrew, Colin C. ; Hall, Jeff ; Zunino, Mike
Author_Institution :
Motorola Inc., Tempe, AZ, USA
Abstract :
This paper presents a 4-terminal, physically based, high-voltage diffused resistor model. The model accounts for depletion, inversion, and accumulation at the surface due to metal field plates, as well as the depletion pinching effect at the sides and bottom of the resistor diffusion
Keywords :
BiCMOS integrated circuits; integrated circuit modelling; power integrated circuits; resistors; semiconductor device models; 4-terminal compact model; HV BiCMOS process; HV diffused resistor model; VHV-SmarTMOS technology; accumulation; depletion pinching effect; high voltage diffused resistors; inversion; metal field plates; BiCMOS integrated circuits; Difference equations; Doping; Electrons; Immune system; Isolation technology; Resistors; Semiconductor process modeling; Solid modeling; Voltage;
Conference_Titel :
Bipolar/BiCMOS Circuits and Technology Meeting, 1997. Proceedings of the
Conference_Location :
Minneapolis, MN
Print_ISBN :
0-7803-3916-9
DOI :
10.1109/BIPOL.1997.647420
