A distributed microactuator conveyance system with integrated controller

This paper summarizes research towards the realization of a fully-integrated, compact, intelligent MEMS (Smart MEMS). The system performs the cooperative function of microactuators by integration with sensors and processors. By using a cooperative operation the weak force of each microactuator is gathered so the system can produce a strong force, in preserving the precise motion control thanks to the high resonant frequency of microactuators and short feedback cycle of the integrated processor. The design of a demonstration system is presented in this paper