A distributed microactuator conveyance system with integrated controller

Author

Mita, Yoshio ; Kaiser, Andreas ; Stefanelli, Bruno ; Garda, Patrick ; Milgram, Maurice ; Fujita, Hiroyki

Author_Institution

Dept. of Ind. Sci., Tokyo Univ., Japan

Volume

1

fYear

1999

fDate

1999

Firstpage

18

Abstract

This paper summarizes research towards the realization of a fully-integrated, compact, intelligent MEMS (Smart MEMS). The system performs the cooperative function of microactuators by integration with sensors and processors. By using a cooperative operation the weak force of each microactuator is gathered so the system can produce a strong force, in preserving the precise motion control thanks to the high resonant frequency of microactuators and short feedback cycle of the integrated processor. The design of a demonstration system is presented in this paper

Keywords

feedback; intelligent actuators; materials handling; microactuators; microcontrollers; motion control; object recognition; Smart MEMS; cooperative function; distributed microactuator conveyance system; fully-integrated compact intelligent MEMS; high resonant frequency; integrated controller; motion control; processors; sensors; short feedback cycle; Competitive intelligence; Force feedback; Force sensors; Intelligent sensors; Microactuators; Micromechanical devices; Motion control; Process design; Resonant frequency; Sensor systems;

fLanguage

English

Publisher

ieee

Conference_Titel

Systems, Man, and Cybernetics, 1999. IEEE SMC '99 Conference Proceedings. 1999 IEEE International Conference on

Conference_Location

Tokyo

ISSN

1062-922X

Print_ISBN

0-7803-5731-0

Type

conf

DOI

10.1109/ICSMC.1999.814033

Filename

814033