• DocumentCode
    3496469
  • Title

    Measures of quality-factor in gap-closing electrostatic resonators

  • Author

    Shmulevich, Shai ; Lerman, M. ; Elata, David

  • Author_Institution
    Fac. of Mech. Eng., Technion - Israel Inst. of Technol., Haifa, Israel
  • fYear
    2013
  • fDate
    20-24 Jan. 2013
  • Firstpage
    417
  • Lastpage
    420
  • Abstract
    We present analytic expressions and experimental verification for common measures of quality-factor in gap-closing electrostatic resonators. We show that peak-gain, peak-sharpness and logarithmic decrement are distinctively different and are not equal to the quality-factor of the system. The significance of this work is that it clarifies the correct way in which the performance of MEMS resonators should be reported to avoid ambiguity.
  • Keywords
    Q-factor; electrostatic devices; microcavities; micromechanical resonators; MEMS resonators; gap-closing electrostatic resonators; logarithmic decrement; peak gain; peak sharpness; quality factor; Electrostatic measurements; Electrostatics; Frequency measurement; Mechanical variables measurement; Q factor; Q measurement; Resonant frequency;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on
  • Conference_Location
    Taipei
  • ISSN
    1084-6999
  • Print_ISBN
    978-1-4673-5654-1
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2013.6474267
  • Filename
    6474267
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3496469