Title :
Micro actuator array on a flexible sheet — Smart MEMS sheet
Author :
Ataka, M. ; Fujita, Hideaki
Author_Institution :
Center for Int. Res. on MicroNano Mechatron., Univ. of Tokyo, Tokyo, Japan
Abstract :
This paper reports fabrication results of a microactuator array on a flexible sheet. The design was based on the concept of “smart MEMS sheet”, a flexible version of autonomous decentralized MEMS. The fabricated actuator array consists of thermally driven cantilever actuators (ciliary actuators) and the flexible sheet is Kapton® sheet. Both are made of Polyimide, a flexible material. We succeeded to fabricate 768 actuators on the sheet of 18mm × 24mm and tried to operate it as a 2D manipulator on a curved surface.
Keywords :
cantilevers; flexible manipulators; microactuators; microfabrication; micromanipulators; polymer films; 2D manipulator; Kapton sheet; autonomous decentralized MEMS; ciliary actuators; curved surface; flexible material; flexible sheet; microactuator array fabrication; polyimide; smart MEMS sheet; thermally-driven cantilever actuators; Actuators; Arrays; Fabrication; Manipulators; Micromechanical devices; Polyimides; Substrates;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on
Conference_Location :
Taipei
Print_ISBN :
978-1-4673-5654-1
DOI :
10.1109/MEMSYS.2013.6474297
