DocumentCode
3497196
Title
Development of novel microactuators driven by lquid crystalline materials
Author
Chono, S. ; Tsuji, Takao
Author_Institution
Kochi Univ. of Technol., Kami, Japan
fYear
2013
fDate
20-24 Jan. 2013
Firstpage
552
Lastpage
555
Abstract
We have developed novel microactuators which are driven by liquid crystalline (LC) materials. Because of their simple structure and the high shape adaptability of LC materials, LC actuators are able to be easily downsized and are appropriate for MEMS use [1,2]. Another advantage of LC actuators is the low-voltage drive (~10V) compared with other kinds of microactuators, such as piezoelectric actuators [3], electro-conjugate fluid actuators [4], and electrostatic actuators [5]. In this study, we introduce LC linear-motors and motors by showing their performances.
Keywords
linear motors; microactuators; micromotors; LC actuators; LC linear-motors; LC materials; MEMS use; electroconjugate fluid actuators; electrostatic actuators; liquid crystalline materials; low-voltage drive; microactuator development; piezoelectric actuators; shape adaptability; Electric fields; Glass; Liquid crystals; Microactuators; Stress;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on
Conference_Location
Taipei
ISSN
1084-6999
Print_ISBN
978-1-4673-5654-1
Type
conf
DOI
10.1109/MEMSYS.2013.6474301
Filename
6474301
Link To Document