• DocumentCode
    3497446
  • Title

    5.4 MHz dog-bone oscillating AFM probe with thermal actuation and piezoresistive detection

  • Author

    Xiong, Zheng-Mei ; Mairiaux, Estelle ; Walter, Bohme ; Faucher, Marc ; Buchaillot, Lionel ; Legrand, B.

  • Author_Institution
    NAM6 Group, Inst. d´´Electron., de Microelectron. et de Nanotechnol., France
  • fYear
    2013
  • fDate
    20-24 Jan. 2013
  • Firstpage
    592
  • Lastpage
    595
  • Abstract
    We report on a new concept of Atomic Force Microscope (AFM) oscillating probes using dog-bone resonator with thermal excitation and piezoresistive detection. The resonance frequency is 5.4 MHz and the quality factor is measured about 4,000 in air. AFM images are obtained over PMMA resist sample and the force resolution deduced from the measurement is about 320 pN/Hz0.5.
  • Keywords
    Q-factor; atomic force microscopy; piezoresistive devices; resonators; PMMA resist sample; atomic force microscope images; dog-bone oscillating atomic force microscope probe; dog-bone resonator; force resolution; frequency 5.4 MHz; piezoresistive detection; quality factor; resonance frequency; thermal actuation; thermal excitation; Force; Frequency measurement; Piezoresistance; Probes; Q factor; Resonant frequency; Vibrations;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on
  • Conference_Location
    Taipei
  • ISSN
    1084-6999
  • Print_ISBN
    978-1-4673-5654-1
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2013.6474311
  • Filename
    6474311
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3497446