Title :
Fabrication and testing of hemispherical MEMS wineglass resonators
Author :
Pai, Pradeep ; Chowdhury, Fahmida K. ; Pourzand, Hoorad ; Tabib-Azar, Massood
Author_Institution :
Electr. & Comput. Eng., Univ. of Utah, Salt Lake City, UT, USA
Abstract :
This work focuses on understanding the behavior of 3D hemispherical shells operating in wineglass resonance mode through finite element modeling (FEM). Fabrication of the hemispherical shells was done using micromachining technique. The quality factor of the device was in excess of 10,000 when operated in 50mT vacuum. The shell showed better than 95% sphericity and had an rms surface roughness of ~5nm. The separation in the degenerate frequencies of 4-node wineglass resonance was 5 Hz at a resonant frequency of 22 kHz. Modeling of the device behavior relates the frequency mismatch to the asymmetry in the shell and quantifies it.
Keywords :
Q-factor; finite element analysis; micromachining; micromechanical resonators; surface roughness; 3D hemispherical shells; FEM; device behavior; finite element modeling; frequency 22 kHz; frequency degeneration; hemispherical MEMS wineglass resonators fabrication; hemispherical MEMS wineglass resonators testing; magnetic flux density 50 mT; micromachining technique; quality factor; rms surface roughness; wineglass resonance mode; Electrodes; Fabrication; Finite element methods; Gyroscopes; Micromechanical devices; Resonant frequency; Sensors;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on
Conference_Location :
Taipei
Print_ISBN :
978-1-4673-5654-1
DOI :
10.1109/MEMSYS.2013.6474333