Title :
Fuzzy rectangle-based grid generation and its application to SUPREM-4 grid reconstruction
Author :
Lin, Poleshang ; Perng, Ruey-Kuen ; Li, To-Sing ; Chen, Pao-Chu ; Ju, Yun-Huei
Author_Institution :
Submicron Technol. Div. Electron. Res. & Service Organ., ITRI, Hsin-Chu, Taiwan
Abstract :
A 2-D grid generator, EGG (Erso Grid Generator), is proposed to reconstruct the bad-shaped grid generated by SUPREM-4. EGG uses the fuzzy scheme to generate the rectangle-based grid. With this scheme the grid is generated as well-shaped as possible and the grid number is as small as possible to resolve the geometry features. It is shown that the difficulty in grid generation has been overcome for the geometry with tilt angle structure, e.g. the sun-shaped structure. It is also shown that the bad-shaped grid with large aspect ratio generated by SUPREM-4 during the etch and deposition simulation has been reconstructed by using EGG, and the aspect ratio has been reduced.
Keywords :
digital simulation; electronic engineering computing; fuzzy logic; mesh generation; semiconductor process modelling; 2-D grid generator; Erso Grid Generator; SUPREM-4 grid reconstruction; aspect ratio; fuzzy scheme; rectangle-based grid; semiconductor process simulator; sun-shaped structure; tilt angle structure; Convergence of numerical methods; Etching; Geometry; Mesh generation; Numerical simulation; Oxidation; Partial differential equations; Shape; Solid modeling;
Conference_Titel :
VLSI Technology, Systems, and Applications, 1993. Proceedings of Technical Papers. 1993 International Symposium on
Conference_Location :
Taipei, Taiwan
Print_ISBN :
0-7803-0978-2
DOI :
10.1109/VTSA.1993.263645
