DocumentCode :
3499570
Title :
Integrated micro Wobbe index meter towards on-chip energy content measurement
Author :
Lotters, J.C. ; Lammerink, T.S.J. ; Pap, M.G. ; Sanders, R.G.P. ; de Boer, M.J. ; Mouris, A.J. ; Wiegerink, R.J.
Author_Institution :
Bronkhorst High-Tech BV, Netherlands
fYear :
2013
fDate :
20-24 Jan. 2013
Firstpage :
965
Lastpage :
968
Abstract :
In this paper, the first step towards an on-chip energy content measurement system is presented. The system comprises an integrated micro Wobbe index meter, consisting of 2 gas inlets, a mixer, a combustion chamber, heaters, temperature sensors and an exhaust outlet. With an integrated micro Wobbe meter, the energy content of natural gas, biogas, hydrogen and other fuel gases can be measured accurately, in-line, real-time and with very little gas consumption. First measurement results have indicated the feasibility of the concept.
Keywords :
energy measurement; microfabrication; microsensors; temperature measurement; temperature sensors; biogas; combustion chamber; exhaust outlet; fuel gas; gas consumption; heater; hydrogen gas; integrated microWobbe index meter; microfabrication; mixer; natural gas inlet; on-chip energy content measurement system; temperature sensor; Combustion; Fuels; Heating; Indexes; Semiconductor device measurement; Temperature measurement; Temperature sensors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on
Conference_Location :
Taipei
ISSN :
1084-6999
Print_ISBN :
978-1-4673-5654-1
Type :
conf
DOI :
10.1109/MEMSYS.2013.6474407
Filename :
6474407
Link To Document :
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