Title :
Development of MWCNT embedded micromechanical resonator working as rarefied gas sensor
Author :
Kishihara, Hiroyuki ; Hanasaki, Itsuo ; Matsuzuka, N. ; Yamashita, Ichiro ; Uraoka, Y. ; Isono, Y.
Author_Institution :
Kobe Univ., Kobe, Japan
Abstract :
This research has newly developed the multi-wall carbon nanotubes (MWCNTs) embedded-micro-mechanical resonator working as a novel rarefied gas sensor. The inertial effect of rarefied gas fluid is detected as a variation of the resonance frequency, and the dissipation of the interaction energy between the resonator and the gas molecules affects the damping of oscillation. Thus, two kinds of gaseous species can be distinguished with one device. The MWCNTs have been arranged on the resonator for heightening its sensitivity by the bio-MEMS compatible process. The MWCNTs embedded-resonator has successfully demonstrated to detect and distinguish hydrogen and nitrogen gases under pressures of 0.02 Pa to 0.9 Pa.
Keywords :
carbon nanotubes; gas sensors; hydrogen; microfabrication; micromechanical resonators; microsensors; nitrogen; C; H2; MWCNT embedded micromechanical resonator; N; bioMEMS compatible process; gas molecule; inertial effect; interaction energy dissipation; multiwall carbon nanotube; oscillation damping; pressure 0.02 Pa to 0.9 Pa; rarefied gas fluid detection; rarefied gas sensor; Coatings; Damping; Hydrogen; Proteins; Resonant frequency;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on
Conference_Location :
Taipei
Print_ISBN :
978-1-4673-5654-1
DOI :
10.1109/MEMSYS.2013.6474412
