VMOS, UMOS structures simulation in micro and nano scale

VMOS, UMOS ("V"-groove-metal-oxide-silicon) transistors drain and gate are formed in the groove of "V" or "U" form. Expanding channel area, therefore VMOS and UMOS structures may be used in the power chips. Using VMOS, UMOS saves 40% free space than by using NMOS technology. Nanostructures dimensions are very small, so it is important to keep pn junction in a right depth, and in the all semiconductor manufacturing technological process. Analyzing influence to forming structure of each technological operation, mathematical simulation program SUPREM IV is used. VMOS and UMOS technological operation was simulated in micro and nano level