Title :
Spectra analysis of field emission current from boron doped diamond
Author :
Koinkar, P.M. ; Murakami, R. ; Kashid, R.V. ; Patil, S.S. ; Joag, D.S. ; More, M.A.
Author_Institution :
Center for Int. Cooperation in Eng., Univ. of Tokushima, Tokushima, Japan
Abstract :
Boron doped diamond films were synthesized using microwave plasma chemical vapor deposition (MPCVD) technique. The films were characterized using field emission scanning electron microscopy and Raman spectroscopy. The B2O3 concentration is varied from 1000 to 5000 ppm. With increase in B2O3 concentration particle size decreases, for 5000 ppm it is found to be 30 nm. The turn on field required to draw current density of 1 μA/cm2 is found to be 0.80 V/μm for 5000 ppm B2O3 concentration films. Furthermore, spectral analysis of field emission current is carried out at base pressure of ~ 1 × 10-8 mbar. The field emission current time (I-t) traces show `step´ and `spike´ like fluctuations, with 1/fα type of behavior with α ~ 0.8. The fluctuations in the field emission current are due to various processes occurring on the emitter surface.
Keywords :
Raman spectra; boron; boron compounds; carbon; current density; electron field emission; field emission ion microscopy; particle size; plasma CVD; scanning electron microscopy; thin films; B2O3; C:B; I-t traces; MPCVD technique; Raman spectroscopy; boron doped diamond films; concentration particle size; current density; emitter surface; field emission current analysis; field emission current time traces; field emission scanning electron microscopy; microwave plasma chemical vapor deposition technique; spectra analysis; spike like fluctuations; step like fluctuations; Boron; Current density; Diamond-like carbon; Films; Fluctuations; Plasmas; Spectral analysis; diamond; field emission; noise;
Conference_Titel :
Vacuum Nanoelectronics Conference (IVNC), 2012 25th International
Conference_Location :
Jeju
Print_ISBN :
978-1-4673-1983-6
Electronic_ISBN :
pending
DOI :
10.1109/IVNC.2012.6316882