Title :
Porous silicon ethanol vapor sensor
Author :
Bow, Y.C. ; Kwok, W.M. ; Poon, M.C.
Author_Institution :
Dept. of Electr. & Electron. Eng., Hong Kong Univ. of Sci. & Technol., Clear Water Bay, Hong Kong
Abstract :
A novel very-large-scale-integrable porous Si based ethanol vapor sensor will be presented. It has simple structure, high sensitivity, fast and stable response for ethanol vapor sensing at room environment. To explain the sensor results, a model based on the interaction of adsorbed ethanol molecules and the porous Si layer will also be proposed
Keywords :
elemental semiconductors; gas sensors; organic compounds; porous materials; semiconductor technology; silicon; I-V characteristics; Si; ethanol vapor sensor; porous silicon; sensor fabrication; sensor response; Chemical sensors; Chemical technology; Diodes; Ethanol; Fabrication; Gases; Passivation; Sensor phenomena and characterization; Silicon; Voltage;
Conference_Titel :
Electron Devices Meeting, 1996., IEEE Hong Kong
Print_ISBN :
0-7803-3091-9
DOI :
10.1109/HKEDM.1996.566295
