Solid-state microcoolers and thermal energy harvesting microsystems

A thermoelectric planar microcooler was fabricated on top of a flexible substrate, using Bi₂Te₃ and Sb₂Te₃ thermoelectric elements. Finite element analysis and theoretical calculations previewed a temperature drop of 16°C in the cold area of the device. Bi₂Te₃ and Sb₂Te₃ materials were deposited by thermal co-evaporation on a kapton substrate, 12 ¿m thick. Photolithography and wet-etching were used to patterning the structures. Devices were tested by infrared imaging and results demonstrated that microsystems technology can be applied in the fabrication of thermoelectric microcoolers.