-1/+0.8°C error, accurate temperature sensor using 90nm 1V CMOS for on-line thermal monitoring of VLSI circuits

This paper proposes quite accurate four-transistor temperature sensor designed and developed for thermal testing and monitoring of VLSI circuits. The sensor is featured with an extremely small area of 11.6×4.1μm² and low power consumption of about 25μW. The performance of the sensor is highly linear and the predicted temperature error is merely -1.0∼+0.8°C using two-point calibration within the range of 50∼125°C. The sensor is implemented in ASPLA CMOS 90nm 1P6M process, operated at supply voltage of 1V, and tested successfully.