• DocumentCode
    3514933
  • Title

    Stacking of ultra-thin film packages

  • Author

    Ko, Cheng-Ta ; Shih, Ying-Ching ; Chang, Jing-Yao ; Kuo, Tzu-Ying ; Chen, Yu-Hua ; Ostmann, Andreas ; Manessis, Dionysios

  • Author_Institution
    Electron. & Optoelectron. Res. Labs., Ind. Technol. Res. Inst., Hsinchu
  • fYear
    2008
  • fDate
    1-4 Sept. 2008
  • Firstpage
    125
  • Lastpage
    130
  • Abstract
    This paper brings into light a new ultra-thin and highly flexible package with embedded active chips. In this technology, no supporting and permanent substrates were needed. Copper foil was used as temporal substrate, and it became the bottom circuit after patterning and etching processes. Ultra-thin chips with 20~25 mum thickness were assembled directly on the structured copper foils in a flip-chip fashion. The gap between chip and copper foil was only about 10 mum. Subsequently, the chips were embedded into flexible adhesive/polyimide polymer layers or alternatively in highly elastic polyurethane materials, with a copper foil always laminated on the top. The resultant ultra-thin film package (UTFP) has a thickness of 100 mum only. Each package sticking on a rod with 10 mm diameter could pass the electrical measuring. Stacking of three-layer chip embedded packages had also been realized and passed electrical measurements. The process details on each core technique will be disclosed, and some results will be presented in the paper.
  • Keywords
    electronics packaging; etching; flip-chip devices; thin film circuits; Cu; copper foil; core technique; electrical measurements; embedded active chips; etching processes; flexible adhesive-polyimide polymer layers; flip-chip fashion; package sticking; size 10 mm; size 100 mum; size 20 mum to 25 mum; ultra-thin film packages stacking; Assembly; Circuits; Copper; Electric variables measurement; Etching; Packaging; Polyimides; Semiconductor device measurement; Stacking; Substrates; embedding; stacked ultra-thin module; ultra-thin film package;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electronics System-Integration Technology Conference, 2008. ESTC 2008. 2nd
  • Conference_Location
    Greenwich
  • Print_ISBN
    978-1-4244-2813-7
  • Electronic_ISBN
    978-1-4244-2814-4
  • Type

    conf

  • DOI
    10.1109/ESTC.2008.4684337
  • Filename
    4684337