Characterization of microdefects and microroughness in silicon wafers by a Rayleigh-Brillouin scatte

Author

Lu Taijing ; Ng, S.C.

fYear

1995

fDate

10-14 July 1995

Firstpage

132

Keywords

Absorption; Chemical lasers; Etching; Laser beams; Laser modes; Optical polarization; Power lasers; Silicon; Surface emitting lasers; Temperature;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics, 1995. Technical Digest. CLEO/Pacific Rim'95., Pacific Rim Conference on

Conference_Location

Chiba, Japan

Print_ISBN

0-7803-2400-5

Type

DOI

10.1109/CLEOPR.1995.527027

Filename

527027

Link To Document