Compliant Carbon Nanotube-Metal Contact Structures

Author

Yaglioglu, Onnik ; Martens, Rod ; Cao, Anyuan ; Slocum, A.H.

Author_Institution

Massachusetts Inst. of Technol., Cambridge, MA, USA

fYear

2011

fDate

11-14 Sept. 2011

Firstpage

1

Lastpage

5

Abstract

This paper discusses a method to fabricate contact structures using carbon nanotubes (CNTs) and thin film metal deposition which can be used in applications such as electromechanical probes. We discuss the electrical resistance of CNT structures and electrical enhancement schemes using various metal deposition techniques including sputtering and electroless metal plating. Functional CNT-metal composite contact structures are demonstrated and test results, along with failure mechanisms are discussed. We also discuss factors affecting mechanical compliance, electrical resistance and trade offs between them.

Keywords

carbon nanotubes; contact resistance; failure analysis; sputter deposition; CNT-metal composite contact structures; carbon nanotube; electrical enhancement schemes; electrical resistance; electroless metal plating; electromechanical probes; failure mechanisms; mechanical compliance; sputtering; thin film metal deposition; Carbon nanotubes; Films; Gold; Probes; Resistance; Sputtering;

fLanguage

English

Publisher

ieee

Conference_Titel

Electrical Contacts (Holm), 2011 IEEE 57th Holm Conference on

Conference_Location

Minneapolis, MN

ISSN

1062-6808

Print_ISBN

978-1-61284-650-7

Type

conf

DOI

10.1109/HOLM.2011.6034802

Filename

6034802