Title :
Fabrication of miniaturized thick-film arms for thermoelectric microgenerators
Author :
Markowski, P. ; Dziedzic, A.
Author_Institution :
Fac. of Microsyst. Electron. & Photonics, Wroclaw Univ. of Technol., Wroclaw, Poland
Abstract :
In the paper fabrication process of miniaturized thick-film arms for metal-based thermoelectric microgenerator is presented. Ones arms were fabricated using special photoimaginable ink and photolithography processing. Second arms were screen-printed using standard ink, then laser shaped. In the result process of fabrication narrow paths for microgenerator was elaborated.
Keywords :
ink; laser beam applications; photolithography; thermoelectric conversion; thick film circuits; laser shaped arm; metal-based thermoelectric microgenerator; miniaturized thick-film arm fabrication; photoimaginable ink; photolithography processing; screen-printing; Fabrication; Ink; Laser beam cutting; Nickel; Seminars; Springs; Substrates;
Conference_Titel :
Electronics Technology (ISSE), 2010 33rd International Spring Seminar on
Conference_Location :
Warsaw
Print_ISBN :
978-1-4244-7849-1
Electronic_ISBN :
978-1-4244-7850-7
DOI :
10.1109/ISSE.2010.5547264
