Title :
Recent trend of piezoelectric actuator developments
Author_Institution :
Mater. Res. Lab., Pennsylvania State Univ., University Park, PA, USA
Abstract :
In these several years, piezoelectric have become key components in smart actuator/sensor systems such as precision positioners, miniature ultrasonic motors and adaptive mechanical dampers. This paper reviews recent developments of piezoelectric and related ceramic actuators with particular focus on the improvement of actuator materials, device designs and applications
Keywords :
intelligent actuators; lead compounds; micropositioning; piezoceramics; piezoelectric actuators; ultrasonic motors; Europe; Japan; PZN-PT; PZT; PbZnMoO-PbTi3; PbZrO3TiO3; USA; actuator applications; actuator design; actuator materials; adaptive mechanical dampers; ceramic actuators; miniature ultrasonic motors; phase change materials; piezoelectric actuator; precision positioner; smart actuator/sensor systems; Capacitive sensors; Ceramics; Crystalline materials; Crystals; Ferroelectric materials; Intelligent actuators; Piezoelectric actuators; Piezoelectric materials; Piezoelectric polarization; Piezoelectric transducers;
Conference_Titel :
Micromechatronics and Human Science, 1999. MHS '99. Proceedings of 1999 International Symposium on
Conference_Location :
Nagoya
Print_ISBN :
0-7803-5790-6
DOI :
10.1109/MHS.1999.819975
