DocumentCode
3521180
Title
A multi-project MEMS lecture and laboratory course
Author
Fuller, Lynn
Author_Institution
Dept. of Microelectron. Eng., Rochester Inst. of Technol., NY, USA
fYear
1997
fDate
20-23 Jul 1997
Firstpage
141
Lastpage
144
Abstract
This paper will describe a senior/graduate level, elective, lecture and laboratory course Microelectromechanical Systems (MEMs). The course was designed for students in RIT´s microelectronic engineering program. Therefore, the students had a basic understanding of most processing technologies. The lecture focused on physical fundamentals of mechanical structures and MEMs specific process technology. The laboratory part of the program included device design, process design, maskmaking, processing and testing of a multi-project chip
Keywords
educational courses; electronic engineering education; micromechanical devices; MEMS; laboratory course; lecture course; microelectronic engineering; multi-project chip; Chemical lasers; Doping; Laboratories; Lithography; Micromechanical devices; Plasma applications; Plasma temperature; Resists; Silicon; Wet etching;
fLanguage
English
Publisher
ieee
Conference_Titel
University/Government/Industry Microelectronics Symposium, 1997., Proceedings of the Twelfth Biennial
Conference_Location
Rochester, NY
ISSN
0749-6877
Print_ISBN
0-7803-3790-5
Type
conf
DOI
10.1109/UGIM.1997.616709
Filename
616709
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