DocumentCode
3523978
Title
High-average-power, high-repetition-rate, injection-seeded 213 nm generation for optical microlithography
Author
Kubota, Sho ; Masuda, Hiroji ; Kikuchi, Hiroaki ; Oka, Mitsuru ; Alexander, James
Author_Institution
Kubota Opto-Electronics Laboratory, Research Center, Sony Corporation
Volume
11
fYear
1997
fDate
18-23 May 1997
Firstpage
511
Lastpage
512
Keywords
Bandwidth; Frequency conversion; Laser beams; Laser excitation; Nonlinear optics; Optical harmonic generation; Optical pulse generation; Optical pumping; Pulse modulation; Pump lasers;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 1997. CLEO '97., Summaries of Papers Presented at the Conference on
Conference_Location
Baltimore, MD, USA
Print_ISBN
0-7803-4125-2
Type
conf
DOI
10.1109/CLEO.1997.603520
Filename
603520
Link To Document