Title :
New micromachined membrane switches in silicon technology
Author :
Hiltmann, Kai ; Schumacher, Axel ; Guttmann, Kai ; Lemp, Engelbert ; Sandmaier, Hermann ; Lang, Walter
Author_Institution :
HSG-IMIT, Villingen-Schwenningen, Germany
Abstract :
This paper presents a new generation of micromachined membrane switches containing a glass substrate and a silicon membrane. Upon external actuation, two planar substrate contacts are closed by a metal layer deposited on the switching membrane. The switching position is constant to better than 1 μm and has been observed to move about 0.7 μm over the achieved lifetime of 20 million electromechanical cycles under electrical loads of 12 V and 10 mA
Keywords :
elemental semiconductors; membranes; microactuators; micromachining; semiconductor device metallisation; semiconductor device reliability; semiconductor device testing; semiconductor switches; silicon; 10 mA; 12 V; Si; electrical loads; electromechanical cycles; external actuation; glass substrate; metal layer; micromachined membrane switches; planar substrate contacts; silicon membrane; silicon technology; switching membrane; switching position; Biomembranes; Contacts; Etching; Glass; Manufacturing; Metallization; Relays; Silicon; Substrates; Switches;
Conference_Titel :
Electrical Contacts, 2001. Proceedings of the Forty-Seventh IEEE Holm Conference on
Conference_Location :
Montreal, Que.
Print_ISBN :
0-7803-6667-0
DOI :
10.1109/HOLM.2001.953198
