DocumentCode
3525294
Title
Polyimide optical waveguides fabricated by direct electron beam writing
Author
Sakata, T. ; Maruno, T. ; Ishii, T. ; Maruo, Y.Y. ; Sasaki, S. ; Tamamura, T.
fYear
1995
fDate
10-14 July 1995
Firstpage
198
Keywords
Electron beams; Electron optics; Optical films; Optical losses; Optical polymers; Optical refraction; Optical variables control; Optical waveguides; Polyimides; Writing;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 1995. Technical Digest. CLEO/Pacific Rim'95., Pacific Rim Conference on
Conference_Location
Chiba, Japan
Print_ISBN
0-7803-2400-5
Type
conf
DOI
10.1109/CLEOPR.1995.527134
Filename
527134
Link To Document