Title :
Development of soft magnetic thin films for GHz applications
Author :
Shim, J. ; Kim, I. ; Kim, J. ; Han, S.H. ; Kim, H.J. ; Ki Hyeon Kim ; Yamaguchi, Masahiro
Author_Institution :
Dept. of Mater. Eng. Sci., Hanyang Univ., Ansan, South Korea
Abstract :
We recently fabricated as-deposited Fe-Co-Ni-B soft magnetic thin films by RF magnetron sputtering which have 4πMs of 21.5 kG, coercivity (Hc) of 0.9 Oe, and the linear effective permeability of about 600 up to 1 GHz. Furthermore, a more effective method for increasing Hk, i.e. an oblique deposition method, was suggested. Therefore, we have investigated the effects of the new, method on high frequency characteristics of Fe-Co-Ni-B soft magnetic thin films by the analysis of magnetic properties and microstructures. The soft magnetic properties and high frequency characteristics of single layer FeCoNiB thin films can be controlled by the oblique deposition method.
Keywords :
boron alloys; cobalt alloys; coercive force; crystal microstructure; ferromagnetic materials; iron alloys; magnetic permeability; magnetic thin films; metallic thin films; nickel alloys; soft magnetic materials; sputter deposition; 1 GHz; 21.5 kG; FeCoNiB; coercivity; high frequency characteristics; linear effective permeability; magnetic properties; microstructures; oblique deposition method; soft magnetic thin films; Frequency; Magnetic anisotropy; Magnetic films; Magnetic materials; Magnetic properties; Magnetic resonance; Permeability; Saturation magnetization; Soft magnetic materials; Sputtering;
Conference_Titel :
Magnetics Conference, 2005. INTERMAG Asia 2005. Digests of the IEEE International
Print_ISBN :
0-7803-9009-1
DOI :
10.1109/INTMAG.2005.1463448
