Title :
Highly [001] oriented L10 FePt thin film using NiTa seed layer
Author_Institution :
Corp. R & D Center, Toshiba Corp., Kawasaki, Japan
Abstract :
A highly [001] oriented L10-FePt film with large coercivity is fabricated on glass substrate using a Ni-Ta alloy seed layer with O2 exposure process. Samples of Ni60Ta40/Cr/Pt/Fe48Pt52 layered structure were deposited on glass substrates successively in an in-line sputtering system. The magnetic properties and the crystallographic structures were then evaluated using a vibrating sample magnetometer and an X-ray diffractometer, respectively.
Keywords :
X-ray diffraction; coercive force; iron alloys; magnetic thin films; magnetometers; metallic thin films; nickel alloys; oxidation; platinum alloys; sputter deposition; Ni60Ta40-Cr-Pt-Fe48Pt52; O2 exposure process; SiO2; X-ray diffractometer; [001] oriented thin film; coercivity; crystallographic structures; magnetic properties; seed layer; sputtering system; vibrating sample magnetometer; Chromium; Coercive force; Crystallography; Glass; Iron; Magnetic properties; Magnetometers; Sputtering; Substrates; X-ray diffraction;
Conference_Titel :
Magnetics Conference, 2005. INTERMAG Asia 2005. Digests of the IEEE International
Print_ISBN :
0-7803-9009-1
DOI :
10.1109/INTMAG.2005.1463468
