• DocumentCode
    3528337
  • Title

    Study of techniques for improving back-contact of CuO-nanowire emitters in a microstructure

  • Author

    Zhan, R.Z. ; Chen, Jun ; Deng, S.Z. ; Xu, N.S.

  • Author_Institution
    State Key Lab. of Optoelectron. Mater. & Technol., Sun Yat-sen Univ., Guangzhou, China
  • fYear
    2009
  • fDate
    20-24 July 2009
  • Firstpage
    303
  • Lastpage
    304
  • Abstract
    In this study, the fabrication technologies for a gated CuO nanowire emitter were investigated. It is found that the interlayer between CuO nanoemitter and cathode electrode is crucial to achieve good emission. Attempts were made to improve the interlayer structure, including using multilayer-metal thin film electrode and etch residue cleaning.
  • Keywords
    cathodes; copper compounds; crystal microstructure; nanofabrication; nanowires; thin films; CuO; cathode electrode; etch residue cleaning; interlayer structure; microstructure; multilayer-metal thin film electrode; nanowire emitters; Anodes; Cathodes; Electrodes; Etching; Fabrication; Green cleaning; Insulation; Microstructure; Nanowires; Sputtering;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Vacuum Nanoelectronics Conference, 2009. IVNC 2009. 22nd International
  • Conference_Location
    Shizuoka
  • Print_ISBN
    978-1-4244-3587-6
  • Electronic_ISBN
    978-1-4244-3588-3
  • Type

    conf

  • DOI
    10.1109/IVNC.2009.5271699
  • Filename
    5271699