Title :
Study microstructures of IC and vacuum nanoelectron devices with electron beam nondestructively microscopically layered endoscopy detecting
Author :
Hu, Wenguo ; Fei, Xinliang ; Chen, Mingguang ; Xiao, Lin ; Liang, Zhuguang ; Rau, E.I. ; Zhou, Kailin ; Wang, Jian ; Lan, Dechun ; Li, Ping
Author_Institution :
Sch. of Phys. Sci. & Technol., Yunnan Univ., Kunming, China
Abstract :
This paper is introduced untouchedly and nondestructively detect the layered microstructures and defects of the VNED and IC. This new method is called ldquoelectron beam nondestructively microscopically layered endoscopy VNED and IC detecting method and instrumentrdquo.
Keywords :
electron beam testing; integrated circuit testing; nanoelectronics; nondestructive testing; vacuum microelectronics; IC microstructures; electron beam VNED; layered microstructures; microscopically layered endoscopy; nondestructive detection; vacuum nanoelectron devices; Circuits; Displays; Electron beams; Electron microscopy; Endoscopes; Instruments; Microstructure; Nanoscale devices; Scanning electron microscopy; Surface topography;
Conference_Titel :
Vacuum Nanoelectronics Conference, 2009. IVNC 2009. 22nd International
Conference_Location :
Shizuoka
Print_ISBN :
978-1-4244-3587-6
Electronic_ISBN :
978-1-4244-3588-3
DOI :
10.1109/IVNC.2009.5271703
