Design and fabrication of on-chip square spiral antenna for ISM band

Author

Ramezani, M. ; Miladi, H. ; Shahabadi, M. ; Mohajerzadeh, S. ; Tamaddon, A.H.

Author_Institution

Dept. of Electr. & Comput. Eng., Univ. of Tehran, Tehran, Iran

fYear

2009

fDate

23-25 Nov. 2009

Firstpage

1

Lastpage

4

Abstract

A spiral antenna operating at 24 GHz designed for scientific and medical (ISM) band is reported. The procedure is fully compatible with standard CMOS fabrication process. The fabrication has been achieved on silicon substrates using a bulk micromachining technique. To improve the radiation efficiency and to minimize transmission loss, a silicon-based membrane has been employed on silicon substrates. To optimize the occupied area of the antenna a square spiral structure is selected rather than the circular one. The simulation results show a good matching and wide bandwidth operation of the spiral antenna.

Keywords

CMOS integrated circuits; micromachining; microwave antennas; silicon; spiral antennas; CMOS; ISM band; Si; bulk micromachining technique; frequency 24 GHz; on-chip square spiral antenna; Bandwidth; Dielectric substrates; Dipole antennas; Fabrication; Feeds; Micromachining; Permittivity; Silicon; Slot antennas; Spirals; ISM band; bulk micromachining; on-chip antenna; silicon; spiral;

fLanguage

English

Publisher

ieee

Conference_Titel

Instrumentation, Communications, Information Technology, and Biomedical Engineering (ICICI-BME), 2009 International Conference on

Conference_Location

Bandung

Print_ISBN

978-1-4244-4999-6

Electronic_ISBN

978-1-4244-5000-8

Type

conf

DOI

10.1109/ICICI-BME.2009.5417280

Filename

5417280