DocumentCode
352999
Title
MEMS microswitch arrays for reconfigurable distributed microwave components
Author
Bozler, C. ; Drangmeister, R. ; Duffy, S. ; Gouker, M. ; Knecht, J. ; Kushner, L. ; Parr, R. ; Rabe, S. ; Travis, L.
Author_Institution
Lincoln Lab., MIT, Lexington, MA, USA
Volume
1
fYear
2000
fDate
11-16 June 2000
Firstpage
153
Abstract
A novel MEMS switch design for use in microwave circuits is presented. The microswitch is capable of being configured in a multi-element X-Y array for use in tunable distributed circuits. Circuit design concepts using microswitch arrays and measurements of single microswitch performance are given.
Keywords
micromechanical devices; microwave switches; MEMS microswitch array; reconfigurable distributed microwave component; tunable microwave distributed circuit; Bandwidth; Contacts; Frequency; Micromechanical devices; Microswitches; Microwave antenna arrays; Microwave circuits; Microwave devices; Silicon compounds; Switches;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Symposium Digest. 2000 IEEE MTT-S International
Conference_Location
Boston, MA, USA
ISSN
0149-645X
Print_ISBN
0-7803-5687-X
Type
conf
DOI
10.1109/MWSYM.2000.860909
Filename
860909
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