DocumentCode
3531748
Title
Improved dot size uniformity and luminescence of InAs quantum dots on InP substrate
Author
Qiu, Yueming ; Uhl, David
Author_Institution
Jet Propulsion Lab., California Inst. of Technol., Pasadena, CA, USA
fYear
2003
fDate
12-16 May 2003
Firstpage
445
Lastpage
447
Abstract
InAs self-organized quantum dots have been grown in InGaAs quantum well on InP substrates by metalorganic vapor phase epitaxy. We find out that the underlying InGaAs layer could affect the dot growth dramatically in terms of size distribution and luminescence efficiency. After inserting a thin GaAs interface layer between the underlying InGaAs and the InAs QD layer, improved dot size uniformity and strong room temperature photoluminescence up to 2 μm were observed. The results suggest that InAs from the underlying InGaAs layer contribute to the InAs QD formation, and cause the InAs QDs to be non-uniform, but a thin GaAs interface layer could effectively block the migration of In atoms from the InGaAs layer toward InAs QDs, and therefore lead to more uniform QD formation with better luminescence efficiency.
Keywords
III-V semiconductors; indium compounds; photoluminescence; self-assembly; semiconductor quantum dots; 2 micron; 300 K; InAs; InAs quantum dots; InGaAs; InP; dot growth; dot size uniformity; luminescence efficiency; metalorganic vapor phase epitaxy; photoluminescence; self-organized quantum dots; size distribution; Atomic layer deposition; Epitaxial growth; Gallium arsenide; Indium gallium arsenide; Indium phosphide; Luminescence; Photoluminescence; Quantum dots; Substrates; Temperature;
fLanguage
English
Publisher
ieee
Conference_Titel
Indium Phosphide and Related Materials, 2003. International Conference on
Print_ISBN
0-7803-7704-4
Type
conf
DOI
10.1109/ICIPRM.2003.1205412
Filename
1205412
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