• DocumentCode
    3531748
  • Title

    Improved dot size uniformity and luminescence of InAs quantum dots on InP substrate

  • Author

    Qiu, Yueming ; Uhl, David

  • Author_Institution
    Jet Propulsion Lab., California Inst. of Technol., Pasadena, CA, USA
  • fYear
    2003
  • fDate
    12-16 May 2003
  • Firstpage
    445
  • Lastpage
    447
  • Abstract
    InAs self-organized quantum dots have been grown in InGaAs quantum well on InP substrates by metalorganic vapor phase epitaxy. We find out that the underlying InGaAs layer could affect the dot growth dramatically in terms of size distribution and luminescence efficiency. After inserting a thin GaAs interface layer between the underlying InGaAs and the InAs QD layer, improved dot size uniformity and strong room temperature photoluminescence up to 2 μm were observed. The results suggest that InAs from the underlying InGaAs layer contribute to the InAs QD formation, and cause the InAs QDs to be non-uniform, but a thin GaAs interface layer could effectively block the migration of In atoms from the InGaAs layer toward InAs QDs, and therefore lead to more uniform QD formation with better luminescence efficiency.
  • Keywords
    III-V semiconductors; indium compounds; photoluminescence; self-assembly; semiconductor quantum dots; 2 micron; 300 K; InAs; InAs quantum dots; InGaAs; InP; dot growth; dot size uniformity; luminescence efficiency; metalorganic vapor phase epitaxy; photoluminescence; self-organized quantum dots; size distribution; Atomic layer deposition; Epitaxial growth; Gallium arsenide; Indium gallium arsenide; Indium phosphide; Luminescence; Photoluminescence; Quantum dots; Substrates; Temperature;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Indium Phosphide and Related Materials, 2003. International Conference on
  • Print_ISBN
    0-7803-7704-4
  • Type

    conf

  • DOI
    10.1109/ICIPRM.2003.1205412
  • Filename
    1205412